Structures, Adhesion Strengths, and Corrosion Resistance of Undoped, Nitrogen-Doped, and Platinum/Ruthenium/Nitrogen-Co-Doped Diamond-Like Carbon Thin FilmsPages 10-28
Nay Win Khun Abstract:
Three different types of diamond-like carbon (DLC) thin films, namely, DLC, nitrogen-doped DLC (N-DLC), and platinum/ruthenium/nitrogen-co-doped DLC (PtRuN-DLC) nanocomposite, were deposited on p-type silicon (p-Si) substrates via DC magnetron sputtering deposition to comparatively study their structures, adhesion strengths, and corrosion resistance in a 1 M HCl solution. The N doping caused graphitization of the N-DLC thin film, as the PtRuN-DLC nanocomposite thin film had the highest graphitization among the films. The DLC thin film and PtRuN-DLC nanocomposite thin film had the lowest and highest adhesion strengths, respectively. The N-DLC thin film exhibited lower corrosion resistance in the HCl solution than the DLC one due to its degraded sp3-bonded cross-linking structure, while the PtRuN-DLC nanocomposite thin film had the highest corrosion resistance in the same solution due to the combined effects of its increased electrical resistivity and the co-doping of electrochemically nobler Pt and Ru than the C matrix. The co-doping of Pt, Ru, and N had a strong influence on the structures, adhesion strengths, and corrosion resistance of DLC thin films.
Keywords: DLC,
Pt, Ru, and N doping,
Structures,
Adhesion strength,
Corrosion
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