Friction and Wear of Nitrogen Doped DLC Coating and Platinum/Ruthenium/Nitrogen Co-Doped DLC Nano-Composite CoatingPages 67-77
Nay Win Khun Abstract:
Nitrogen doped diamond-like carbon (NDLC) coating and platinum/ruthenium/nitrogen co-doped DLC nano-composite (PtRuNDLC-NC) coating deposited on silicon (Si) substrates via magnetron sputtering deposition processes were comparatively investigated to understand the effect of co-incorporation of Pt and Ru on their adhesion strength, hardness, and wear. Compared to the NDLC coating, the PtRuNDLC-NC coating had 6.6% lower hardness, but 9.5% higher adhesion strength. The PtRuNDLC-NC coating had the lower abrasive wear resistance under a dry condition than the NDLC coating. It could be concluded that the co-doping of Pt/Ru/N could not give rise to the higher hardness and abrasive wear resistance of DLC coatings than doping of N.
Keywords: DLC coatings,Pt, Ru and N co-doping, Sputtering deposition, Hardness, Wear
|
PDF 